Curriculum Vitae

Jingang Yi
San Diego State University
Department of Mechanical Engineering
Room E-323A Engineering Building
San Diego, CA 92182
Tel: 619-594-3172, Fax: 619-594-3599, E-mail: jgyi@mail.sdsu.edu

Education

Research Interests

Honors/AwardS


Teaching Experience

Research Experience


Publications


Patents

  1. T. Taylor, J. Yi and P. Norton, System and method for in-situ characterization and maintenance of polishing pad smoothness in chemical-mechanical polishing, US Patent 7,153,182, December 26, 2006.
  2. J. Yi and C. Xu, Neural network control of chemical mechanical planarization, US Patent 7,001,243, February 21, 2006.
  3. J. Yi and C. Xu, Methods for monitoring and controlling chemical mechanical planarization, US Patent 6,931,330, August 16, 2005.
  4. J. Yi and C. Xu, End-point detection with image matching in semiconductor manufacturing, US Patent 6,930,782, August 16, 2005.
  5. G. Lee, C. Xu, E. Zhao and J. Yi, Application of heated slurry for oxide CMP, US Patent Application 20040266192, December 30, 2004.

Professional Activities



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